E04100 - SEMI E41 - Exception Management (EM) Standard Revision:SEMI E41-95 - Inactive or customers at incoming inspection

or customers at incoming inspection

This Guide specifies the technique for collecting and analyzing Nanotopography data

For layers with thicknesses between 1 µm and 25 µm

SEMI T9-0200 (Reapproved 1104)

and touch panel

E04100 - SEMI E41 - Exception Management (EM) Standard Revision:SEMI E41-95 - Inactive or customers at incoming inspectionInteractive exception handling enhances the error recovery ability while maintaining automated control in the factory. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling. This standard specifies capabilities to be provided by the exception agent for effective reporting and interaction with respect to abnormal situations in the equipment. It describes the